Hi-Nano Micromachining Services

Micro hole drilling

(down to 30 um holes in 200 um thick glass)

Hi-Nano is dedicated to developing micromachining and micro-hole drilling techniques.

We have become one of the few companies in the world capable to drill high precision micro holes.

Our company’s current hole drilling achievement is 60x40um square holes in 300um substrate.

Micro hole drilling

60x40um square holes in 300 um thick Si3N4.
Holes thinner than human hair.

Photo taken under 1000X microscope.

The Current market trend for hole drilling:

  • Increasingly smaller diameters
  • Tighter pitches
  • Higher aspect ratios

Industrial materials include

  • Silicon
  • Diamond
  • Sapphire
  • Quartz
  • Glass
  • Ceramics
  • Silicon nitride
  • Thin metal

Applications for micro holes

  • Nozzles
  • Optical pinhole
  • Via holes
  • Orifices
  • Micro-pumps
  • Probing cards
  • Filters
  • Inkjet nozzle plates
  • Fiber spinneret

We machine

  • Free shape geometric holes